Reducer in electronic wafer processing
1. Wafer transfer system
Wafer transport systems are needed to move wafers from one processing step to another, and these processes require extremely high precision and stability to avoid wafer damage. Reducers are used in wafer transfer robotic arms to provide precise motion control, ensuring that the wafer can maintain a stable and accurate positioning during the transfer process and avoiding damage to the wafer surface caused by vibration.
2. Wafer grinding and polishing equipment
In the wafer processing of semiconductor manufacturing, grinding and polishing are one of the key processes. These processes require equipment that can provide very stable low-speed, high-torque motion to achieve fine surface treatments. Planetary reducers are used in grinding and polishing equipment to ensure stable rotation and uniform movement of wafers during processing, thereby improving the surface finish of the wafers and reducing the defect rate.
3. Wafer cutting equipment
Wafer dicing is the process of cutting large wafers into small chips in semiconductor manufacturing. This process requires extreme precision to ensure the accuracy and uniformity of the cuts. Planetary reducers are used in the drive system of the cutting machine to provide stable movement and high torque output to ensure that the cutting tool can remain stable during execution and reduce stress on the wafer to avoid damage.
4. Lithography Equipment
Photolithography equipment is one of the core technologies in semiconductor manufacturing and is used to etch tiny circuit structures on the surface of wafers. Lithography machines require precise motion control to ensure that the position of the wafer corresponds precisely to the optical system. The reducer is used in the mobile platform and positioning system of the lithography machine to provide high-precision motion control, ensuring accurate alignment of the wafer and the light source, thereby improving the accuracy and consistency of circuit etching.
5. Wafer loading and unloading equipment
Automated wafer loading and unloading systems need to ensure stability and precision during wafer handling to avoid collision or damage. Planetary reducers are used to drive these automated equipment, ensuring that wafers can be smoothly and accurately loaded into each process and safely removed and installed after processing, thereby improving production efficiency and reducing human errors.
6. Wafer inspection equipment
After going through multiple manufacturing processes, wafers need to be inspected in detail to ensure that their surfaces are defect-free and meet process standards. Wafer inspection equipment uses planetary reducers to drive precision mobile platforms that can adjust the position of the wafer with micron-level accuracy to ensure that the inspection instrument can perform a comprehensive inspection of each wafer.
7. Etching and deposition equipment
During the etching and deposition processes in wafer manufacturing, the wafer needs to be rotated to evenly distribute the material or gas. Planetary reducers are used in the rotating mechanisms of these devices to provide stable and precise motion, ensuring that materials can be evenly deposited on the wafer surface, thereby improving product quality and manufacturing accuracy.
8. Wafer storage and handling system
In a semiconductor manufacturing plant, wafers need to be transported and stored between different equipment. These handling systems usually require fast and smooth movements without causing any damage to the wafers. Planetary reducers can provide high-precision and stable drive, supporting the efficient and safe operation of automated storage and handling systems.
9. Semiconductor packaging equipment
After wafer processing is completed, semiconductor components need to be packaged. Packaging equipment involves delicate welding, cutting, testing and other operations. Planetary reducers provide stable drive and high-precision control for these devices, ensuring that each component can be processed accurately and reducing errors and scrap rates in the packaging process.
10. Semiconductor testing equipment
Test equipment is needed to perform functional tests on each chip and ensure that its performance meets specification requirements. These devices require precise control of the movement of each test probe to ensure that each test point is accurately contacted. The planetary reducer can provide high-precision drive to ensure stability and accuracy during the test.